E-beam evaporation

During electron beam evaporation (or E-Beam evaporation), evaporant materials are heated to high temperatures through bombardment by high-energy electron streams.

E-beam evaporation is a suitable technique for deposition of materials with the highest evaporation temperatures, including refractory metals and metal oxides. Moorfield’s MiniLab range is ideal for electron beam evaporation.

E-beam evaporation products

Edwards e306
Edwards e306
Moorfield have been working with the Edwards E306 system for more than 2 decades.
MiniLab 060
The most popular platform in our MiniLab range, MiniLab 060 systems have front-loading box-type chambers ideal for multiple-source magnetron sputtering but also thermal and e-beam evaporation.
MiniLab 080
MiniLab 080
MiniLab 080 systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.
MiniLab 090
MiniLab 090
MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available.
MiniLab 125
MiniLab 125
MiniLab 125 tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets for coating large areas, and a range of load-lock options enable high-throughput operation. At the same time, systems are fully cust

Knowledge base articles about E-beam evaporation

Knowledge base

nanoPVD-T15A chamber interior with two TE1 sources for metals evaporation
PVD techniques
Moorfield are experienced in all common PVD techniques and can supply systems with fully-integrated component sets. Standalone components also available….

Knowledge base

E-Beam featured
Electron-beam evaporation
Like all evaporative physical vapour deposition (PVD) methods, electron-beam evaporation (also known as e-beam evaporation) involves heating a material under vacuum conditions (typically in the 10-7 mbar region, or lower). This in-turn releases a vapour that moves up through a process chamber and coats a substrate at the top….

Recent news about E-beam evaporation

Metal-insulator-metal diodes based on alkyltrichlorosilane self-assembled monolayers
This paper reports the fabrication metal-insulator-metal (MIM) diodes based on alkyltrichlorosilane self-assembled monolayers (SAMs) and investigation of the effects of parameters such as alkyl chain length on the electronic properties, for applications in high speed electronics….

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