nanoPVD-S10A-WA

The nanoPVD-S10A-WA is a Wide-Area configuration that extends the capabilities of the nanoPVD-S10A to allow for even coating of substrate diameters up to 8″, in a benchtop package.
nanoPVD S10A
Techniques

While keeping the same chamber design, the Wide-Area version of the nanoPVD-S10A contains magnetron sputtering sources oriented directly upwards towards substrate platens. This arrangement in combination with substrate rotation and exposure plates with specially-designed orifices allows for coating of substrates up to 8″ diameter for applications in which tight uniformity specifications are not critical.

Like the nanoPVD-S10A, magnetrons are water-cooled for sustained high-power operation and accept industry-standard targets. In addition, nanoPVD-S10A-WA units come with all attractive features of the nanoPVD range including turbomolecular pumping systems, recipe-based automated operation via touchscreen HMIs, and compact designs for benchtop location.

Download the nanoPVD-S10A-WA product brochure
Key features
  • Application-specific configuration for the nanoPVD-S10A
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  • Uniform coating for substrates up to 8” diameter
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  • Water-cooled magnetron sputtering sources for industry-standard 2″ targets
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  • MFC-controlled process gases
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  • DC and/or RF power supplies
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  • Fully automatic operation via touchscreen HMI
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  • Define/save multiple process recipes
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  • Base pressures <5 × 10-7 mbar
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  • Equipped for easy servicing
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  • Comprehensive safety features
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  • Cleanroom compatible
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  • Proven performance
  • Options
  • Dry backing pump
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  • Fast chamber vent
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  • Automatic high-resolution pressure control
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  • Additional process gases
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  • Up to 2 magnetron sputtering sources
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  • RF and/or DC power supplies
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  • SputterSwitch power supply/source switching technology
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  • Quartz crystal sensor head
  • Typical configurations

    As per your requirements
    The nanoPVD-S10-WA is a semi-custom tool, with final design being subject to customer requirements.

    Service requirements

    All nanoPVD-S10A systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas supplies, and electrical power. Exact requirements will be provided with quotations or on request.

    Get a quote for nanoPVD-S10A-WA

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