Moorfield Nanotechnology

UK Laboratory Equipment Specialists in PVD (Physical Vapour Deposition), CVD (Chemical Vapour Deposition) and Etch Systems

Our systems are used for academic and industrial research, including semiconductors, photovoltaics, graphene and 2D materials.

Moorfield’s world-class scientific laboratory equipment is built to match your research needs. We can also service and repair existing tools, and provide advice relating to a custom project.

Solutions

Thermal processing
Thermal processing
Complete thermal processing systems and bespoke components for high-temperature sample processing under controlled low-pressure, inert and reactive atmospheres.
Thermal Evaporation
Thermal evaporation
Thermal evaporation is a straightforward means of thin film deposition with materials being heated to evaporation temperatures via a resistively heated support.
Soft-Etching
Plasma etching
Plasma etching technology from Moorfield is used for for Soft Etching of sensitive materials, reactive ion etching (RIE) and for substrate cleaning. The technology is available packaged into dedicated nanoETCH tools or in combination with other hardware inside larger MiniLab process chambers and load-locks.
slide_nanopvd-s10a_1
Physical vapour deposition
PVD systems have been at the core of our business for two decades.
Nanoparticle Vacuum Deposition
Nanoparticle Vacuum Deposition
Nanoparticle vacuum deposition sources allow for the deposition, under high-vacuum conditions, of nanoparticles with sizes in the range of 1–20 nm. The sources can be fitted to MiniLab systems with process chambers customised for accepting the necessary hardware.
Magnetron Sputtering
Magnetron sputtering
In magnetron sputtering, magnetic fields focus plasmas onto target material surfaces, ejecting material that moves through the plasma to coat substrates. Suitable for depositing most materials (with correct choice of sputtering power supply).
Low temperature evaporation
Low temperature evaporation
In low temperature evaporation (LTE), resistive heating is used to evaporate materials held in a crucible.
Glovebox soft etching
Glovebox soft-etching
Moorfield introduce their glovebox-integrated MiniLab 026 “soft-etching” tools for researchers working on graphene and 2D materials that require sample handling in inert atmospheres.
Glovebox systems
Glovebox integrated systems
Glovebox-compatible MiniLab systems for physical vapour deposition (PVD), etching and annealing processes.
Thermal processing
Thermal processing
Complete thermal processing systems and bespoke components for high-temperature sample processing under controlled low-pressure, inert and reactive atmospheres.
Thermal Evaporation
Thermal evaporation
Thermal evaporation is a straightforward means of thin film deposition with materials being heated to evaporation temperatures via a resistively heated support.
Soft-Etching
Plasma etching
Plasma etching technology from Moorfield is used for for Soft Etching of sensitive materials, reactive ion etching (RIE) and for substrate cleaning. The technology is available packaged into dedicated nanoETCH tools or in combination with other hardware inside larger MiniLab process chambers and load-locks.
slide_nanopvd-s10a_1
Physical vapour deposition
PVD systems have been at the core of our business for two decades.

Our products

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Sort by solution
Edwards e306
Edwards e306
Moorfield have been working with the Edwards E306 system for more than 2 decades.
ANNEAL
ANNEAL
High-temperature vacuum annealing for planar substrates, up to 1000 °C, with precision gas and pressure control—all in a benchtop package.
nanoEM
The nanoEM system is the first electron microscopy coating tool with a full, research-grade feature set.
nanoCVD-WPG
nanoCVD-WG(P)
A compact, plasma-enhanced, wafer-scale CVD (Chemical Vapour Deposition) system for rapid synthesis of high-quality graphene.

What Moorfield delivers

Expert-level support
Worldwide distribution
Compact system footprint
Research-grade tools
Multiple techniques
Custom design
Cleanroom compatible
Powerful software

What Moorfield delivers

Expert-level support
Worldwide distribution
Compact system footprint
Research-grade tools
Multiple techniques
Custom design
Cleanroom compatible
Powerful software

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