Moorfield’s cutting edge deposition systems have enabled our R&D into state-of-the-art microelectronic devices since we received our first system in 2006. We now have multiple tools, including a combined magnetron sputtering and electron-beam evaporation cluster. We have been continuously impressed by their innovative, flexible designs and their rapid, expert support.DR. MICHAEL COOKE
This paper reports the fabrication metal-insulator-metal (MIM) diodes based on alkyltrichlorosilane self-assembled monolayers (SAMs) and investigation of the effects of parameters such as alkyl chain length on the electronic properties, for applications in high speed electronics.