Electron-beam evaporation

E-Beam featured

Like all evaporative physical vapour deposition (PVD) methods, electron-beam evaporation (also known as e-beam evaporation) involves heating a material under vacuum conditions (typically in the 10-7 mbar region, or lower). This in-turn releases a vapour that moves up through a process chamber and coats a substrate at the top.

On the road again

This June, Moorfield will be touring the Benelux territories with local representative ST Instruments. In the back of the van will be a working nanoPVD-S10A system!

A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density

Jin, J., et al. Journal of Physics D: Applied Physics 2018 DOI: 10.1086/1361-6463/aaa4a2 The authors report the fabrication of high-speed Schottky diode rectifiers from zinc oxide, with PtOx Schottky contacts. For this, ZnO was deposited using PE-ALD, while metal and PtOx contacts were produced by RF sputtering using a Moorfield nanoPVD-S10A system, including in reactive sputtering mode […]

RAMS 2017 Conference

Moorfield will be at the RAMS 2017 conference at the University of Exeter. Come along to meet our expert sales engineers and to see demos of our benchtop nanoPVD (thin-film deposition) and nanoCVD (graphene synthesis) systems.

Schottky diodes on ZnO thin films grown by plasma-enhanced atomic layer deposition

Jin, J., et al. IEEE Transactions on Electron Devices 2017 DOI: 10.1109/TED.2016.2647284 Zinc oxide Schottky diodes are fabricated using PE-ALD with RF sputtering used to create the silver oxide contact electrodes. RF sputtering was carried out using a nanoPVD-S10A system from Moorfield. Diode performance was optimised by tuning the PE-ALD parameters, with an optimised device […]

New nanoPVD at Queen’s University Belfast

Moorfield has recently shipped the new bench top nanoPVD model S10A RF/DC sputter unit to Queen’s University Belfast, School of Mathematics and Physics. The unit will be used for high-quality dielectric films, wave guides and SEM sample preparation.

Exeter gets nanoPVD

Moorfield has installed the nanoPVD model T15A at the University of Exeter, Department of Physics. The unit is configured for organic deposition and includes the automatic process control option.

Strong Interest in nanoPVD-T15A

We recently launched the latest model in our compact (benchtop) nanoPVD range, the model T15A. With research-grade thermal evaporation capabilities, easy operation and a budget-friendly price, this system is already proving extremely popular!

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