Allows for complete rebuild of nanoCVD heater stage. Kit contains: Carbon-carbon composite heater element, ceramic bolts × 2, ceramic bush x 2, power legs × 2, graphite washers × 2. Ceramic heater element support plate, ceramic substrate support top piece.
New Chinese distribution partner
Moorfield Nanotechnology have recently appointed a distributor in China for their PVD, CVD, and etch systems.
