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Thin film monitoring and control systems
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SQS242 thin film process control software
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Seamless integration with SQM242 PCI card straight out of the box!
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Familiar point and click Windows® interface
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Single screen process development - no buried, mutli-level menus
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Unlimited processes, films, materials stored in Microsoft Access®
database
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Measures up to eight sensors, controls up to four sources
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Up to four channel deposition
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| Process, Films, Materials |
Unlimited #, 12 Character Alpha Numeric names,
stored in Microsoft Access database |
| Layers, Rate Ramps |
Unlimited #, stored in Microsoft Access database |
| Process Setup |
Windows Cut/Copy/Paste. All parameters
available from a single screen |
| Pre Conditioning |
2 Ramp/Soak power cycles per film. User
sets ramp time, soak time, and soak power |
| Shutter Delay |
User sets on/off, required accuracy, and delay
timeout |
| Deposition |
Unlimited number of rate ramps
Set PID control terms. Switch to/from manual power during deposition
Set required control accuracy and error action (ignore, stop, or hold power)
Set rate sampling mode (continuous, time based, accuracy based) |
| Post Conditioning |
1 Feed and Idle cycle per film |
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Copyright © 2001 Moorfield Associates
Tel: +44 (0) 1565 722609
... Fax: +44 (0) 1565 722758
Last modified: January 12, 2007
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