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Thin
film monitoring and control systems
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| SQM-160 Thin Film
Deposition Monitor |
- Low cost
- Easy to use
- multi-film capability
- relay outputs for event control
- 2 QCM capability
- PC data connection
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Features
- Two to six quartz crystal measurement
channels
- Averages multiple sensors for improved
accuracy
- Displays Rate/Thickness or Frequency
- Adjustable reading rate, resolution, and
filter
- Data collection and graphing software
included
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| Sensor
Inputs |
2 (standard) to 6
(optional) |
Thickness
Resolution |
1 Å |
| Frequency
Range |
4.0MHZ to 6.0MHZ |
Rate
Resolution |
0.1 Å/s or 0.01
Å/s |
| Measurement
Period |
.15-2.0 sec. |
Frequency
Resolution |
0.1 Hz |
| Frequency
Accuracy |
.01% at 2
reading/second |
Rate
Accuracy |
.5% typical |
| Relays |
Shutter
Thickness Setpoint
Time Setpoint
Crystal Fail |
Inputs |
Open Shutter
Close Shutter
Zero Thickness
Zero Time |
| Dimensions |
88.5mm x
212.7mm x 196.9mm |
Power |
90-140VAC,
180-240VAC, 50-60HZ |
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Typical configuration for a full system:
SQM160, Sensor kit (BNC cable set, oscillator, crystals, head to feed through
cable), Feed through, quartz crystal head.
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questions or comments about this web site.
Copyright © 2001 Moorfield Associates
Tel: +44 (0) 1565 722609
... Fax: +44 (0) 1565 722758
Last modified: January 12, 2007
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