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The SQC-122 controls deposition rate
and thickness in multi-layer thin film
processes. It is a low-cost solution for
more reliable and accurate deposition
than is possible with manual control.
Ease of use was a primary goal in
designing the SQC-122. The six context
sensitive Softkeys provide rapid access to
frequently used data. The detented
setting knob provides a quick and
flexible way to set values and navigate
menus. And the main operating menu
is always a button push away.
Up to 25 processes, consisting of 250
layers and 25 materials can be stored.
Cut/copy/paste capabilities make it easy
to modify or duplicate processes, or
layers in a process.
The two 6MHz quartz crystal sensor
inputs can be configured for alternate
materials, rate averaging, or as dual
sensors. Two 0 to ±10V outputs are
available to control evaporation source
supplies.
Eight process control relays, eight digital
inputs, RS-232, and a handheld power
control module are standard. A Windows
program for computer setup and data
acquisition is also included.
The SQC-122 is the newest addition
to Sigma’s line of thin film deposition
monitor and control products.
It is the most economical and easy-to-use
deposition controller available.
In a typical deposition cycle, power is ramped
slowly, to pre-condition the source material for
deposition. Then a shutter delay period allows the
process to achieve a stable state before exposing
the film substrate. During deposition, the SQC-122
measures the sensors and adjusts the source
supply voltage to maintain the desired deposition
rate (or rates). Once the final thickness setpoint is
reached, power is reduced to an idle state. The
entire cycle may be repeated to deposit additional
films. Or, a single film may be deposited without
shutter delay or multiple rates.
In either case, the SQC-122 controls the entire
process. The eight output relays control source and
sensor shutters, and provide information about the
progress of deposition to external systems. Digital
inputs allow external control of the SQC-122 to
duplicate basic user operations such as process
Start/Stop.
Through the entire cycle, the SQC-122 displays
information about the progress of deposition on
the main screen. Graphs of rate, rate deviation, or
power can be easily selected. The Quick Setup key
provides instant access to commonly adjusted
settings, with easy return to the main screen.
And the Manual/Auto key allows the user to take
manual control at any time.
If you have any questions, please contact a Moorfield application
engineer to learn how the SQC-122
can help put your process in control!
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