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Thin film monitoring and control systems
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SID242 Co-Deposition
Controller
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- Uses up to 8 quartz
sensors to control the deposition rate and thickness of up to 4 materials
simultaneously
- Unlimited processes, films, materials in Microsoft Access® database
- Familiar Windows® user interface with color LCD display
- Single-screen process setup
- Flexible I/O
- SQM-242 card and SQS-242 software available
separately
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Sensor Inputs
(4to 8) |
Standard quartz crystal oscillator |
Source Outputs
(2 to 4) |
0 to ±10V |
| Frequency Range |
1.0MHZ to10MHZ |
Output Resolution |
15 bits |
| Measurement Period |
.15-2.0 sec. |
Control Loop Type |
PID |
| Predefined Relays |
Source Shutters: 1, 2
Sensor Shutters: 1,2,3,4
All Sensors Good
All Sensors Bad
Process Running
Deposit Mode
Not Deposit Mode |
Predefined Inputs |
Start Process
Stop Process
Start Film
Stop Film
Zero Thickness
Force Final Thickness |
Computer
(subject to change) |
233MHZ Pentium, 32MB RAM
4.2GB HD, 1.44MB FD
2 serial, 1 parallel ports |
User Interface |
Active Matrix VGA Color LCD
6 Soft Keys, Knob,Touchpad
Windows 98 |
| Dimensions |
5¼" H x 16½" W x
15" D |
Power |
120/240VAC, 47-63HZ |
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Copyright © 2001 Moorfield Associates
Tel: +44 (0) 1565 722609
... Fax: +44 (0) 1565 722758
Last modified: January 12, 2007
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