MiniLab Platforms

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

Minilab

Overview:

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

MiniLab systems provide superior high-vacuum coating performance. All systems have modular designs, providing the flexibility to address a huge range of customer requirements.

The range contains several platforms (see below), with each having a distinct chamber volume and shape. While all chambers are built to the same high standards, larger chambers allow for more techniques and flexibility than their smaller counterparts.

In addition to thin-film deposition, MiniLab systems can also be fitted with complementary techniques such as ion beam sources, etching components and annealing stages.

We specialise in custom solutions! Call us to discuss your needs today.

Techniques:

MiniLab tools can be fitted with all major PVD techniques:

  • Electron-beam (‘e-beam’) evaporation: Ultra-high temperature evaporation of metals and non-metals such as dielectrics
  • Low-temperature thermal evaporation (LTE): Controlled low temperatures for evaporation of volatile materials, typically organic compounds
  • Standard thermal evaporation: Evaporation of metals from resistively heated filaments and boats
  • High-temperature thermal evaporation: High-current resistive evaporation of metals and non-metals
  • Magnetron sputtering: Focussed plasma sputtering of metal and non-metal targets



It is possible to fit multiple techniques on-board a single MiniLab system.

We also offer a variety of substrate stage options (heating; cooling; bias; etching; rotation; etc.), and can incorporate most third-party vacuum components.

For more information, select a platform below.

MiniLab 026 Platform

MiniLab 026 Platform

MiniLab 026 systems are ultra-compact floor standing vacuum evaporators for metal, dielectric and/or organic (OLED/PLED) thin-film deposition. The MiniLab 026 is also glovebox compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox.

View system

MiniLab 060 Platform

MiniLab 060 Platform

MiniLab 060 systems are the smallest of our pilot-line units — but don’t be fooled by their compact footprint. They can pack 4 × 3" sputter sources and a 300 mm substrate into their chambers. Configurations range from a manually operated thermal system up to a multiple technique tool with fully-automated process control.

View system

MiniLab 080 Platform

MiniLab 080 Platform

For users requiring greater deposition ‘throw’ (distance from source to substrate), the MiniLab 080 series with D-shaped front-loading chamber offers an additional 150 mm giving a total working distance of up to 450 mm making this platform the ideal choice for e-beam and LTE deposition. As with the 060 units, load-lock options are available on this series.

View system

MiniLab 090 Platform

MiniLab 090 Platform

MiniLab 090 systems are configured for glovebox integration. These tools have slightly larger chambers than the 080 series, but with a similar aspect ratio that is ideal for point-source deposition techniques such as e-beam and thermal evaporation.

View system

MiniLab 125 Platform

MiniLab 125 Platform

The MiniLab 125 series is a true contender for small batch production in a professional environment. The D-shaped front-loading chamber is water-cooled/heated and allows for fast cycle times, whilst the “plug and play” MiniLab modular design gives rapid tool change availability. And all this at a very competitive price! Load-lock options are available on this series.

View system

© 2017 Moorfield Nanotechnology Limited.