MiniLab Platforms

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

Minilab

Overview:

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

MiniLab systems provide superior high-vacuum coating performance. All systems have modular designs, providing the flexibility to address a huge range of customer requirements.

The range contains several platforms (see below), with each having a distinct chamber volume and shape. While all chambers are built to the same high standards, larger chambers allow for more techniques and flexibility than their smaller counterparts.

In addition to thin-film deposition, MiniLab systems can also be fitted with complementary techniques such as ion beam sources, etching components and annealing stages.

We specialise in custom solutions! Call us to discuss your needs today.

Techniques:

MiniLab tools can be fitted with all major PVD techniques:

  • Electron-beam (‘e-beam’) evaporation: Ultra-high temperature evaporation of metals and non-metals such as dielectrics
  • Low-temperature thermal evaporation (LTE): Controlled low temperatures for evaporation of volatile materials, typically organic compounds
  • Standard thermal evaporation: Evaporation of metals from resistively heated filaments and boats
  • High-temperature thermal evaporation: High-current resistive evaporation of metals and non-metals
  • Magnetron sputtering: Focussed plasma sputtering of metal and non-metal targets



It is possible to fit multiple techniques on-board a single MiniLab system.

We also offer a variety of substrate stage options (heating; cooling; bias; etching; rotation; etc.), and can incorporate most third-party vacuum components.

For more information, select a platform below.

MiniLab 026

MiniLab 026

MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.

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MiniLab 060

MiniLab 060

MiniLab 060 systems have cubic chambers ideal for magnetron sputtering (up to 4 × 3" diameter sources), but that can also be fitted with evaporation components. The smallest MiniLab that can be fitetd with a load-lock.

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MiniLab 080

MiniLab 080

Tall chambers ideally suited for evaporation techniques that require longer working distances for optimum uniformity.

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MiniLab 090

MiniLab 090

Glovebox-compatible chambers with front and rear doors that are suitable for supporting all major deposition techniques.

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MiniLab 125

MiniLab 125

Large cubic chambers for large-scale R&D up to pilot-scale production. Capable of holding all PVD techniques, and can be fitted with load-locks and planetary stages for high-throughput operation.

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