| · The MOS system is extremely
robust – simultaneous detection of the laser spot
array makes the measurement virtually immune to
vibration. · Flexible design allows
mounting in either a single port (normal incidence) or
2-port configuration.
· Integrated
Windows 95/NT software provides real-time analysis and
display of film strain, substrate curvature,
stress-thickness product or mean differential spot
spacing.
· Measurement can
be performed with substrate rotation using fully
supported external triggering functions.
|
· Optimized optics and
detection system combined with proven fitting algorithms
result in radius of curvature detection exceeding 10
kilometers. ·
2-dimensional laser array can provide surface curvature
and strain topography mapping.
· Can be used for
real-time compositional profiling and elastic constant
determination.
|
