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The EBE4 is a compact electron beam source for
deposition in pilot line/ R&D systems.
The unique turret rotation system incorporates an integral
bearing housing together with water distribution manifold.
Designed as a 5kW plug compatible unit for
Edwards E306 and E610 users, it is easily retrofitted to most standard
evaporation systems as it requires a standard one inch (25mm) O ring
sealed port for mounting.
The emitter assembly has been designed for fast
filament replacement and low maintenance ( it is shielded from deposited
materials). It locates positively via one single hex head machine screw.
Focusing is via a permanent magnet and dispersed
to the active beam area by nickel coated magnet followers. The shape of
the magnet is such that it cannot be assembled in the wrong orientation
after routine maintenance.
Beam sweep is via two lateral coils and one
transverse coil above the emitted beam. When used in conjunction with
the solid state PSU numerous beam sweep patterns can be automatically
generated from the preset EPROM
For multi-hearth users, a manual turret select
and hearth indicator kit is available.
The HT fixing kit includes: 2 off HT feed
throughs, HT copper rod assemblies, 16ft (5mtr) HT cables.
The water connection kit includes: One inch bolt
(25mm) water feed through with flow and return 6mm stainless tubing,
swagelok adaptors, external push on quick connectors ( 6mm – 8mm),
internal length of 6mm tubing with in vacuum cajon connector for
user to cut to length, water flow switch for interlock ( required by PSU
logic),
4 mtrs 8mm nylon tube, 15/8mm reducers, 8mm T x
2.
Summary
EBE4 – 4 hearth electron beam source
EBE4-EFK – HT fitting kit for EBE series
EBE4-WFK – Water fitting kit for EBE series
EBE4-MRK – Manual rotation kit for EBE4
EBE-BP – Base plate mounting kit EBE series
EBE4 PSU3 - Carrera 3 kw output psu, genius std
controller, filament power supply, cabling and interlocks
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