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Vacuum deposition Components and systems

TE4 Thermal Evaporator

4 filament / boat source

Sequential or co-deposition

Low footprint size

Water cooled option for organics

Easy retrofit

Removable cross contamination sector shields for cleaning

 

The TE4 is a compact thermal (resistive) evaporator designed for easy retrofit to any existing vacuum coater.

The base plate is configured such that the user can alter the geometry of the TE4 on the fly, enabling change from 4 hearth sequential deposition to a 2 x 2 co-deposition unit during routine run loading.

The base plate is also pre-configured for retrofit water cooling which reduces radiated heat transferred from active to non active boats. This is vital where metal and organic deposition is undertaken.

Unlike other multi-boat designs, the TE4 does not need to rotate to connect to a power feed through. Each boat’s power contact is discrete , giving repeatable results for the same process at the same power setting.

For customers wishing to retrofit to an Edwards E306 type coater, the TE4C  control unit  replaces the old style variac / meter double bay unit and the 4 position filament switch single bay unit and unbelievably fits into one single bay. Existing LT transformer(s) can be utilised, but if co-deposition is required,  two of TE2C controllers replace the TE4C,additional LT transformer and E306 mains power pack ( up to 20A) are required.

Dependant upon the power required, there are a number of feed through options available. The standard option is for two of one inch bolt feed throughs which allows for 38A of power and co-deposition or sequential configuration

Control system:

There are a number of options available for power supply and control systems.

  TE4C:  4 position filament / boat select switch, digital ammeter display ( actual power through filament), on / off circuit breaker switch, rotary potentiometer power control. 3U x ¼ panel rack space for console mounting (eg E306)

  TE4C-PS:   as above but with integrated 60A 7.5V power supply, all housed in a 2U x ½ panel  steel painted box for rack mounting.

  TE2C: Ideal for those wishing to configure the TE4 to co-deposition. 2 position filament / boat select switch, digital ammeter display ( actual power through filament), on / off circuit breaker switch, rotary potentiometer power control. 3U x ¼ panel rack space for console mounting (eg E306)

  Summary:

  Sequential deposition: 1 x TE4, 1 x TE4C, 2 x feed throughs,  1 x transformer (psu), cable set.

  Co-deposition:  1 x TE4, 2 x TE2C, 2 x feed throughs,  2 x transformers (psu), cable set.

 

TE-4 in 1 x 4 configuration for sequential deposition

 

 

 

 

 

 

TE-4 in 2 x 2 configuration for co-deposition

Technical Specification

Material: All UHV compatible stainless steel and oxygen free copper. Insulators are ceramic.

Mounting: Either by central stud pillar (M8) allowing for rapid source height adjustment, or by four through base mounted studs.

Capacity: up to four filaments / boats. Distance between centres on filament posts is **mm.

Shielding: removable stainless steel sector shields with base plate shield holder projecting large area to water cooling plate.

Associated products

ARDK-8MM - Automated sample rotation kit - 8 mm drive, variable speed motor, gearbox, controller, Sample plate

MRDK-8MM  Manual sample rotation / positioning kit - 8 mm drive, Knob, Sample plate

MSSK-8MM Manual sample shutter kit - 8 mm drive, lever, height adjuster, Shutter plate

MiniBox  E306 chamber upgrade to small box coater. Chamber is part of a modular design conceptand can incorporate all of Moorfields deposition components.

ME10 mini e-beam evaporator for wire samples – evaporator head, linear drive, power supply and cable set.

EBE4 a four hearth electron beam evaporator , magnetically focussed and water cooled crucible turret. Optional electromagnet assembly for beam sweep.

TORUS Magnatron source. Choice of 2” to 6” sputter source for DC and/or RF sputtering. Flexihead option for attitude adjustment.

 

 

 

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Last modified: January 12, 2007
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