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Vacuum deposition Components and systems

Chamber options for E306 retrofit

To fit existing baseplate

Glass or stainless steel option  

Modular system

Direct Edwards replacement

 

BJ14 – a 360mm x 305mm borasilicate glass bell jar for direct replacement of the Edwards E306 vacuum Chamber. Wall thickness varies between 5mm and 7mm. The BJ14 uses a standard viton L seal. We recommend that the seal be replaced at the same time as the bell jar chamber. Custom lengths are also available.

GC350 – a 350mm x 305mm borasilicate glass cylinder for direct replacement of the Edwards E306 vacuum Chamber. Wall thickness varies between 5mm and 7mm. The GC350 is compatible with all Moorfield top hat and top plate options and uses two standard viton L seals. We recommend that the seals are replaced at the same time as the chamber. Custom lengths are also available

TP4P-SS four port stainless steel top plate designed for use with a glass cylinder vacuum chamber. The plate has one central port and three outer ports at 120° on the same PCD. Blind taped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.  
TP1P-SS a single port stainless steel top plate designed for use with a glass cylinder vacuum chamber. The plate has one central port for sample transfer/ rotation or positioning. Blind taped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.  
TH4P-SS four port stainless steel top plate, designed for use with a glass cylinder vacuum chamber, it increases the height of the existing chamber by 100mm. The plate has one central port and three outer ports at 120° on the same PCD. Blind taped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.  
TH1P-SS a single port stainless steel top plate, designed for use with a glass cylinder vacuum chamber, it increases the height of the existing chamber by 100mm. The plate has one central port. Blind taped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.  
MINIBOX - 400mm front loading stainless steel box chamber for users requiring space for full multitechnique deposition and/ or large samples (up to 375mm)

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Last modified: January 12, 2007
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