MiniLab  a multi-technique box coater for pilot line / R&D thin film production

• Flexible R&D pilot line box coater

• E Beam, Sputter and Thermal source options

• Turbo, cryo and diffusion pump options

• Full range of sample tooling, heating stages

• Large substrate capacity

• Fully automated process control facility

The MiniLab 060 is a new concept in vacuum deposition. Created by an experienced team of designers with a background in UHV deposition technology, the Minilab 060 is a fully integrated mini box coater that achieves professional results.

Problems associated with cramped multi-technique box coater systems have been overcome and minaturised. Because MiniLab was designed as a multi-technique system from the start, it is able to adapt to configurations that many larger coating units find impossible to attain.

The chamber is a development of Moorfields popular MINIBOX  E306 retrofit. All stainless steel construction, it has twenty five one inch base ports to facilitate rapid customisation and flexibility of source and accessory positions. Two NW70CF wall ports provide options for front side sample heating, fast action shutter, thin film head, gas admission and optical access to the sample. Three NW70CF top ports provide options for sample rotation / positioning, sample heating, thermocouple and sample bias.   The door window port has visual sample and source access with optional window shutter. The large rear NW200CF port ensures good conductivity for fast pump down.

A fully loaded system would, for example, include the following techniques: 

 2 x 4 or 6 pocket E-Beam sources with auto indexation rotation device; 

 4 x 4 filament thermal sources with high current feed throughs with discrete filament selection and co-dep capability on up to 4 boats at any one time!

4 x 3" flexihead  magnetron sources with 3 channel auto gas management and control system for sputtering

Or a combination of the above

With the maximum sample size a whopping 370mm o/d MiniLab competes with major OEM system designs but at a fraction of the price. Sample change is rapid due to the simple quick release sample plate and boss arrangement

Standard pumping is by way of a 360 l/sec turbo molecular pump and dual stage rotary mechanical backing, roughing pump. An additional cryo panel can be mounted in front of the turbo if high gas loads are experienced. Other pumping options are available.

Vacuum control is one button start / vent, catered for by an onboard PLC which can update the system control menu with real-time status. 

Utilising the latest film monitor and control systems, the user is able to set multi-layer runs and control each step of the process and data log events for off line post analysis. The control system is supplied with off line software for setting up of film runs without the need to suffer down time.

Most importantly, the Minilab 060 is cost effective.   The modular design concept allows for retrofit additions as and when the budget allows.  The Minilab chamber readily accepts components from OEMs so the user is not forced into expensive proprietary purchases.

Technical Specification

Chamber Material: all stainless steel 316

Finish: polished to mirror grade 8

System dimensions (mm): 1650x1120x650

Top plate ports: 3 of NW35CF

Side wall ports: 2 of NW35CF

Rear wall port: 1 of NW150CF

Front door port: 1 of NW63CF

Base port: 25 of NW25 O ring sealed

Door: 12mm s/s with O ring seal

Door seal: 7mm viton in dovetail groove with 2 of thumb screw door retaining clamps

Bakeable:  to 200°C

Leak tested:  to better than 5 x 10^-9 mbar

Options from pumped box with control:

EBE-4: Four hearth rotatable turret electron beam source, water cooled, 5kV / 600mA max emission

TE-4: Thermal evaporator. All UHV construction, four hearth/ filament. 90A selectable PSU.

TORUS: Flexi-head magnatron source. DC and RF compatible

ARDK-8: Automated sample rotation kit  variable speed motor, gearbox, controller, 10 – 60rpm, Sample plate and boss

PC-BAR: Plasma cleaning bar, feed throughs, power supply unit with variable 2000 vdc output, timer and emission control.

ME10:  Mini e-beam evaporator for refractory metal wire samples – locates on side port. Cheapest e-beam retrofit on the market!

AS3000V: Small area dry etch / sample cleaning ion source. Variable 200eV – 3000eV beam energy.

BOC6: Sample heater controller, digital timer, TC and set point, low hysterysis. 2 Zone, 4 outputs.

MiniLab - Manual Thermal / resistive system

MiniLab - Automatic Thermal / resistive system

MiniLab - Manual Sputter system

MiniLab - Automatic Sputter system

MiniLab - Manual Electron Beam system

MiniLab - Automatic Electron Beam system