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The
MINIBOX is a fully retrofittable vacuum chamber designed for the
conversion of an existing Edwards E306 coating unit into a box deposition
system.
Problems
associated with cramped multi-technique bell jar and cylinder systems are
overcome when the chamber is substituted for a MINIBOX
. Because this retrofit has been designed as a multi-technique system
from the start, it is able to adapt to configurations that many larger coating
units find impossible to attain.
All
the existing base ports are usable – the MINIBOX
base mates to the E306 base plate via eight wall clamps, ensuring that the O
ring seal is secure. On the box there are: three top plate ports designed for
sample rotation / positioning, sample heating and sample bias; two side wall
ports for fast action shutter, thin film head, optical access to the sample; a
rear 150mm i/d additional pumping port for turbo or cryo pump retrofit; front
door view port.
The
MINIBOX
can be configured for true multi-technique, multi-layer deposition processes
making it ideal for small scale production and R&D prototyping. A fully
loaded system would, for example, include the following techniques: a 4 pocket
E-Beam source with water cooling, HT and rotation device; a 4 filament thermal
source with high current feed throughs and discrete filament selection; a
“flexihead” magnetron for sputtering, a thin film monitor / controller; a
variable speed rotary sample plate; back side graphite sample heating (to 1200°C);
plasma cleaning; box shielding; sample shutter.
With
the maximum sample size a whopping 375mm o/d the MINIBOX competes with major OEM
system designs but at a fraction of the price.
If
the existing diffusion pump is to be retained as the primary pump, it is
recommended that the backing / roughing pump be upgraded to approximately 30m3h.
This gives a roughing time of circa 2 minutes from vent to the opening of the
diffusion pump plate valve and base pressures of circa 5 x 10-7 mbar
can be attained within 10 minutes from valve deployment.
Existing
Edwards interlocks and controls remain functional after retrofit. Should the
user so wish, Moorfield can supply additional door / water interlocks / power
modification kit for rotary pump upgrade.
For users that feel the
retrofit is beyond their internal DIY capabilities, Moorfield can offer a full
refurbishment and upgrade service either in the field or from their fully fitted
workshop in Plumley, Cheshire. Full clean room facilities (to Class 100) are
available on site for those clients requiring the most stringent quality
standards.
Bespoke modifications can be
supplied (e.g. additional, inclined or enlarged ports) at additional cost.
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