| Vacuum Deposition Components and Systems
|
|
MiniLab is a
multi-technique box coater for pilot line / R&D thin film
production. The unique chamber design enables the whole system
geometry to be rapidly changed enabling high engineer productivity and
system flexibility.
Together with the Sigma SQM242 based control system, its an
amazingly serious piece of kit at an amazing price!
|
|
EBE-4 is a four
hearth electron beam evaporator, water cooled and with 270º permanent
magnet focusing. Options include beam sweep and solid state PSU with
remote controller.
|
|
TORUS sputter sources
for DC
and RF deposition. These sources from KJ Lesker are easy to retro-fit
to most systems including the MiniLab ( max 4 sources) and our E306
MiniBox conversion ( max 3 sources).
If the Flexi-head version is fitted, the user is
able to quickly adjust the geometry for different sample sizes and
sample orbits.
Other options include high field strength magnets
|
|
TE-4 four hearth
resistive (thermal) evaporation source. This little baby is a really
neat solution to a lot of problems associated with multi-hearth
sources. Firstly it has discrete power to each filament which
means that it can be configured for co-dep, secondly it has water
cooled shielding allowing it to be used as an entry level OLED
source or compound metal / organic source as radiated heat doesn't
transfer to the adjacent hearths. Cleaning is easy too as the shields
are removable. Its also retro-fitable to most systems via the M8 base
stud. Use your old power system or check out ours.....
|
|
ME50
refractory wire electron beam evaporator - this all UHV compatible
electron beam evaporator uses a wire as the anode which conveniently
doubles up as the target material. The e-beam is fixed focus so the
wire is moved relative to the beam via a linear retractor. By keeping
the target mass down, the power requirement is very low, which in turn
means that the cost of this component is very low.... in fact its
probably the lowest priced electron beam evaporator and controller on
the market today!
|
|
RIE600 reactive ion etch
component. Known to many users as the "EtchStik", this is a
very simple and inexpensive component and is therefore ideal to
retrofit to an existing sputter system. Located in a 1" base port
and connected via a standard sputter "N" type cable, the
device uses an RF supply to drive a 70mm o/d electrode to circa 1W/cm2
The RIE600 is height adjustable too.
|
|
|
PG-Bar plasma sample
cleaning bar. In an effort to reduce the real estate taken up by many
sample cleaning plasma tools, we designed a simple horizontal etch
electrode that can be swung from a pivot to position the etch facility
at the most advantageous point - or out of the way if not in use.
Simple to install, simple to operate and inexpensive, which is why we
sell so many...
|
|
AS3000V - is a sample
cleaning / dry etch argon ion source designed for use in very clean
and UHV systems. As the name suggests it achieves a maximum 3kV beam
energy which can be varied by the user. The plasma is created in a
discharge cell using electron impact from a hot filament and typical
chamber pressures are of the order of 10-5mb when the
source is in use.
|
|
ARDK-8 sample
rotation stage is designed for retro fit to the MiniLab and MiniBox
chambers, but can also be readily adapted to Edwards E306 systems
using the glass cylinder and top plate arrangement. The ARDK-8 consists
of a sample platen, quick release boss, rotary feed through, drive
coupling, motor with mounting stage, rotary dial variable speed
controller ( 0-60 rpm) and PC interface option.
|
|
BOC6 sample
heating / bakeout system. This very flexible little box of
electronics has many uses from UHV system bake out control to internal
quartz lamp heater control. It is a power supply controlled by a
digital timer with a digital programmable temperature controller
allowing 2 x 2 zone differential outputs. The BOC6 also allows
slave units to be added should more power be required.
|
|
MiniBox
E306 chamber retrofit - turn your old E306 into a multi-technique
box coater with this chamber conversion. Unlike the FL400 from Edwards
which has a radius back, this little box is square, enabling it to get
away from the problems associated with the radial ports and real
estate geometry. If you've ever tried putting more than one technique
into an Edwards coater, then you will already know that this is the
way to do it. We've had 16 thermal sources in this chamber with 4
operating simultaneously!! Eat that Mr Edwards!
|
|
Other
retrofit chamber options - Apart from our full custom chambers and
associated fast entry systems, we also offer Edwards compatible glass
wear and top plates designed to accept the Moorfield and Edwards
accessories.
Check it out! If you require anything special, we
can quote for chambers up to 1 mtr in diameter.
|
|
Thin
film monitoring and control systems - We represent the Sigma range
of thin film monitors and thin film controllers. These are excellent
value professional products that compete with the industry established
IC5 and Intellemetrics kit. Sigma are rapidly becoming the new
alternative. Call for a demo...
|
|
Edwards E306 coater - Ok
so we've been a little cheeky here as these systems are built on a
refurbished vacuum base, but everything in the chamber is new. So the
customer gets a great deal and the end result is a coater that fits
within the budget.
The great thing about the E306 is that most
technicians have used one at some time or other so familiarity is
given.... but if you're one of the few that hasn't seen one, don't
worry as we offer full installation and customer training.
|
