Edwards E306 thin film deposition systems
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Moorfield have been rebuilding and servicing the Edwards E306 range of
evaporators since 1993. We can offer a complete refurbish / rebuild service
for Edward E306 thin film deposition systems. We can re-engineer chambers to
accommodate new techniques, new control systems, revised geometries,
retrofit sample stages, heated stages, cooled stages, tilt stages, bias
stages. |
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E306 Thermal - standard Edwards layouts available including 1,
2 or 3 boat configurations with interspaced shielding. 4 boat TE4 with
optional co-deposition mode. Replacement thermal control systems either
consol or 19" rack mount based. |
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E306 Sputter - standard Edwards layouts available including 1,
2 or 3 head configurations with interspaced shielding. RF, DC and pulsed DC
supplies. Sample bias stages. Replacement quartz crystal control
systems for PID loop deposition control |
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E306 E Beam- repair and refurbishment of standard
Edwards EBE1, EBE3 available . New and upgraded power supplies. Sample
heated / cooled stages. Replacement quartz crystal control systems for
PID loop deposition control. Retro fitted 4 or 6 hearth e beam sources with
manual or auto indexation. |
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E306 Hybrid - we specialise in E306 multi technique system
configurations such as E Beam with thermal, low temperature evaporation with
thermal, sputter with thermal, sputter with e beam. Although the chamber is
small, it can be done! |
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Chamber Options - different techniques and geometries require
different chambers. We offer replacement glass or metal bell jars,
replacement seals, replacement glass or metal cylinders, Minibox stainless
steel front loading box chamber ( ideal for sputter and e beam) |
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E306 Components - A range of rebuilt
/refurbished Edwards E306 components and also the new improved Moorfield
designed components to retrofit to your E306 system. |
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E306 Control Options - safety interlock
upgrades, gauging upgrades, PLC control upgrades and deposition control
upgrades using quartz crystal sensors. |
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E306 Service - system commissioning /
decommissioning, annual service contracts, emergency call out
and on site retrofits |
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Call or email us for more information
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