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We specialise in custom designed and modular designed sample stages. The
modular designs are based around the requirement of the deposition user in
R&D and small scale production. These can be seen on our MiniLab products.
Custom designed stages are based on our heater / cooling and bias
technologies.
The following is a brief of the options:
Movement - static, rotating, tilt, azimuth, X, Y, Z movement.
Operation - manual, automated, semi-automated.
Heating - quartz heating, peltier heating,ceramic heating,
composite carbon heating, SiC heating, graphite heating, NiCr element
heating.
Cooling - water cooling, peltier cooling, glycol cooling, LN2 cooling.
Bias - DC to 500V, RF with filters for CE regs.
Transfer - from /to loadlock automated single, automated multi
cassette, manual single, manual multi cassette. |
