System-on-a-flange
We have put together a range of complimentary components, neatly
organised on a 12" flange and ready to bolt straight onto a vacuum
chamber. The geometry has already been optimised.
The thermal system on a flange consists of :
12" ISO or CF flange with 27mm through hole ports for 1" bolt
components
TE3 deposition source with shielding
400A or optional 1000A water cooled power feed throughs
TE4C controller and associated LT transformer
Solenoid based shutter (ready to interface to a thin film monitor) or
manual shutter
Water cooled variable height quartz crystal sensor head
Vacuum gauge port with base plate to KF25 adaptor
Choice of vacuum gauges. |
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Control systems and power supplies:
There are a number of options available for
power supply and control systems.
TE1C: 19” rack mount 1400VA variac
control unit with manual variac control, digital ammeter display via
external current transformer (actual power through filament),
mains on / off, internal fuse.
TE4C: 19” rack mount 1400VA variac
control unit with manual variac control, 100A 4 position filament / boat
select switch, digital ammeter display (actual power through filament),
mains on / off, internal fuse.
TE4C-E306: 4 position 60A filament /
boat select switch, digital ammeter display ( actual power through
filament), on / off circuit breaker switch, rotary potentiometer /
thyristor power control. 3U x ¼ panel rack space for console mounting
TE2C: Ideal for those wishing to
configure the TE4 to co-deposition. 19” rack mount 1400VA variac control
unit with manual variac control, 100A 2 position filament / boat select
switch, digital ammeter display (actual power through filament), mains
on / off, internal fuse. Note that 2 of these are required to run a TE4
in co-deposition mode.
Power supplies: we offer a range of
replacement and custom LT
transformers ideally suited to thermal /resistive vacuum deposition
applications.
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TE1C single boat controller with remote ct for current
measurement |
