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The MINI EVAPORATOR is a simple yet robust UHV compatible evaporation source
and electronic module designed for the controlled point source deposition of
circa 1mm dia target wire form refractory metals, some semi conductors and
insulators. Due to its small size and CF35 flange monunt it is ideally suitable
for retrofitting to existing UHV chambers.
The unit is based on electron bombardment circuitry at 2000 VDC HT attaining a
maximum emission of 0.025A (50 Watt).The sample is a wire which when held by a
collet type chuck, acts as an anode for the HT from the filament supply. The
user can replenish evaporated material by a linear drive which moves the sample
wire relative to the filament. This also serves to focus the electron beam.
There are filament and shroud degas facilities together with filament current
(max 3.5A) display via a DPM on the front pannel.
By plotting power against temperature, the deposition rate of each target
material can be calculated for a given cross section at a particular pressure
and the potentiometer adjusted for the correct power setting as displayed via a
0 - 50W analogue meter.
Technical Specification
Source: All UHV compatible, CF 35 (70mm o/d) flange mount, Radiation screens
and filament shield to prevent line of sight substrate to filament, Linear
retractor for wire replenishment/ focus, long life filame
Control unit: Digital filament current readout via DPM
Adjustable filament current via 10 turn potentiometer
Sample bias
Mains input: 220/120 50/60 Hz VAC selectable.
Fixed 2000 VDC sample (anode) bias
Maximum output : 50 watt, 2000 VDC bias at 0.025A emission
19 inch x 2u rackmount chassis
Back panel : Mains cable, filament, anode and degas connectors, mains fuse.
Front panel : Mains on, power on, degas on/off, potentiometer, DPM, analogue
meter.
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Pricing
| Description |
Order Code |
£ UK |
$ US |
Euro |
| Package |
ME50P |
7,147 |
12,150 |
11,792 |
| Source only |
ME50S |
3,824 |
6,500 |
6,309 |
| Control/PSU only |
ME50PSU |
3,603 |
6,125 |
5,945 |
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