|
CVC Sputter Tumbler
Custom built Sputter Tumbler c1987 used for coating
small piece parts in large volume. 20" horizontal cylindrical
chamber. 2 of planar magnetrons. DC and RF capability, 1x
Tegal MFC 50 sccm, CT110 pump, VAT throttle valve, substrate rotation /
tumble control, magnetron rotation. QMS RGA 100 amu. Process
control (Vac and timing)
Warranty :None, sold as seen. No demo
available
|
 |
... in stock.
